Publications

[11] An optimized fabrication of high yield CMOS-compatible silicon carbide capacitive pressure sensors.

Meng B, Tang W, Wang Z, Zhang H^*

Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on. 2012: 721-724.

[10] Surface analysis and process optimization of black silicon.

Zhu F, Di Q, Zeng X, Zhang X, Zhao X, Zhang H^*

Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on. 2012: 567-570.

[9] Fabrication and simulation of a novel 3D flexible electromagnetic energy Generator.

Zhang S, Yuan Q, Han M, Zhang H^*

Digest Tech. Papers PowerMEMS 2012, 315-318.

[8] Formation and interaction of micro/nano multi-scale structures.

Zhang X, Zhu F, Zhang H^*

Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on. 2012: 445-448.

[6] Design and fabrication of flexible parylene-based inductors with electroplated NiFe magnetic core for wireless power transmission system.

Sun X, Zheng Y, Li Z, Yu M, Yuan Q, Li X, Zhang H^*

Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on. 2012: 238-242.

[5] Investigation of silicon/glass anodic bonding with PECVD silicon carbide as the intermediate layer.

Tang W, Meng B, Su W, Zhang H^*

Journal of Micromechanics and Microengineering 2012, 22, 095011.

[4] Tunable wetting behavior of nanostructured poly (dimethylsiloxane) by plasma combination

treatments.

Peter N, Zhang X, Chu S, Zhu F, Seidel H, Zhang H^*

Applied Physics Letters 2012, 101, 221601.

[3] Fabrication and characterization of squama-shape micro/nano multi-scale silicon material.

Zhang X, Zhu F, Sun G, Zhang H^*

Science China Technological Sciences 2012, 55, 3395-3400.

[2] Magnetic energy coupling system based on micro-electro-mechanical system coils.

Li X, Yuan Q, Yang T, Liu J, Zhang H^*

Journal of Applied Physics 2012, 111, 07E734.

[1] Electrodeposition and characterization of CoNiMnP permanent magnet arrays for MEMS sensors and actuators.

Sun X¹, Yuan Q¹, Fang D, Zhang H^*

Sensors and Actuators A: Physical 2012, 188, 190-197.